Self sputtering yields of silver under bombardment with polyatomic projectiles

被引：13

作者：

Duvenbeck, A ^{[1
]}

Lindenblatt, M ^{[1
]}

Wucher, A ^{[1
]}

机构：

[1] Univ Duisburg Gesamthsch, Inst Phys Expt, Dept Phys, D-45117 Essen, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2005年 / 228卷

关键词：

molecular dynamics simulations; sputtering; nonlinear effects; cluster bombardment; collisional spikes;

D O I：

10.1016/j.nimb.2004.10.041

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Molecular dynamics (MD) have been employed to model self sputtering yields of an Ag(111) surface under bombardment with Ag (m = 1,2,3,4) projectiles. It is shown that the effect of projectile orientation on the sputter yield decreases strongly with increasing m and becomes practically negligible under Ag-4 impact. For polyatomic projectiles we observe a nonlinear yield enhancement which is discussed in terms of the collisional spike model of Sigmund and Claussen. It is shown that the MD simulation provides a unique method to determine the essential input parameters T-0 and <p(0)(2)> entering that model. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：170 / 175

页数：6

共 18 条

[1] Molecular-dynamics study of craters formed by energetic Cu cluster impact on Cu [J].

Aderjan, R ;

Urbassek, HM .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2000, 164 :697-704

[2] NONLINEAR EFFECTS IN HEAVY-ION SPUTTERING [J].

ANDERSEN, HH ;

BAY, HL .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (02) :953-954

[3] Giant metal sputtering yields induced by 20-5000 keV atom gold clusters [J].

Andersen, HH ;

Brunelle, A ;

Della-Negra, S ;

Depauw, J ;

Jacquet, D ;

Le Beyec, Y ;

Chaumont, J ;

Bernas, H .

PHYSICAL REVIEW LETTERS, 1998, 80 (24) :5433-5436

[4] Gold-cluster ranges in aluminium, silicon and copper [J].

Andersen, HH ;

Johansen, A ;

Olsen, M ;

Touboltsev, V .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2003, 212 :56-62

[5] Very large gold and silver sputtering yields induced by keV to MeV energy Aun clusters (n=1-13) -: art. no. 144106 [J].

Bouneau, S ;

Brunelle, A ;

Della-Negra, S ;

Depauw, J ;

Jacquet, D ;

Le Beyec, Y ;

Pautrat, M ;

Fallavier, M ;

Poizat, JC ;

Andersen, HH .

PHYSICAL REVIEW B, 2002, 65 (14) :1-8

[6] Simulation of keV clusters incident on gold targets [J].

Childs, AM ;

Shapiro, MH ;

Tombrello, TA .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 143 (03) :298-305

[7] SPUTTERING FROM ELASTIC-COLLISION SPIKES - SPHERICAL GEOMETRY [J].

CLAUSSEN, C .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 194 (1-3) :567-571

[8] Au sputtering by cluster bombardment: A molecular dynamics study [J].

Colla, TJ ;

Urbassek, HM .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2000, 164 :687-696

[9] Sputtering of Au (111) induced by 16-keV Au cluster bombardment: Spikes, craters, late emission and fluctuations [J].

Colla, TJ ;

Aderjan, R ;

Kissel, R ;

Urbassek, HM .

PHYSICAL REVIEW B, 2000, 62 (12) :8487-8493

[10] Computer simulation of low-energy electronic excitations in atomic collision cascades [J].

Duvenbeck, A ;

Sroubek, F ;

Sroubek, Z ;

Wucher, A .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2004, 225 (04) :464-477

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