Gold-cluster ranges in aluminium, silicon and copper

被引：35

作者：

Andersen, HH ^{[1
]}

Johansen, A ^{[1
]}

Olsen, M ^{[1
]}

Touboltsev, V ^{[1
]}

机构：

[1] Niels Bohr Inst, Orsted Lab, DK-2100 Copenhagen O, Denmark

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2003年 / 212卷

关键词：

clusters; ranges; range straggling; non-linear effects; nuclear stopping;

D O I：

10.1016/S0168-583X(03)01479-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Single atom Au and Au-2, Au-3 and Au-7 clusters with energies of 10-100 keV/atom have been implanted at low fluence into Al, Si and Cu targets, the Au-7 clusters only at 44.3 keV/atom into Si. The range distributions were analyzed by oblique (15degrees) incidence RBS. In no case was the range found to be different for the cluster implant from that of the atomic implant at equal velocity, implying the nuclear stopping to be identical, but the 10 keV/atom implant in Cu showed the cluster distributions to be substantially broader than those of the atomic implants. The energies were thus too high to observe a possible 'clearing the way' effect, but the Cu results hint at a 'within spike' diffusion mechanism. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：56 / 62

页数：7

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