Planar inductor with ferrite layers for DC-DC converter

被引：76

作者：

Fukuda, Y ^{[1
]}

Inoue, T

Mizoguchi, T

Yatabe, S

Tachi, Y

机构：

[1] JFE Steel Corp, Tech Res Labs, Chiba 2600835, Japan

[2] Kawasaki Steel Corp, Tech Res Labs, Chiba 2600835, Japan

[3] Toshiba Corp Semicond Co, Yokohama, Kanagawa 2478585, Japan

[4] Toshiba Microelect Corp, Yokohama, Kanagawa 2478585, Japan

[5] Kawatetsu Min Co Ltd, Chiba 2600835, Japan

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2003年 / 39卷 / 04期

关键词：

DC-DC converter; ferrite layer; planar inductor; screen printing;

D O I：

10.1109/TMAG.2003.812708

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We fabricated planar inductors with ferrite layers by a screen printing, photolithography, and electroplating process. The screen printing method made it possible to obtain a coil spacing filled with ferrite. In this structure, the perpendicular leakage magnetic flux preferentially passes through the coil spacing and bypasses the copper conductor line, a path that is expected to reduce eddy current loss. Trial samples of a planar inductor with ferrite layers achieved a high-quality Q factor of 40-70 at 5 MHz. Magnetic field analysis revealed that the eddy current loss of the conductor line was only 2.4% of total loss.

引用

页码：2057 / 2061

页数：5

共 8 条

[1] Design of microfabricated inductors [J].