Growth and characterization of bulk AIN substrates grown by PVT

被引:6
作者
Bickermann, M
Epelbaum, BM
Kazan, M
Herro, Z
Masri, P
Winnacker, A
机构
[1] Univ Erlangen Nurnberg, Dept Mat Sci 6, D-91058 Erlangen, Germany
[2] Univ Montpellier 2, CNRS, UMR5650, Etud Semicond Grp, F-34095 Montpellier, France
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2005年 / 202卷 / 04期
关键词
D O I
10.1002/pssa.200460416
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have grown bulk AlN boules by PVT at different growth temperatures. The grown material is single-phase wurtzite AlN containing about 100 ppm wt of oxygen; transition metals are present only in the sub-ppm range. Vibrational spectroscopy shows that structural quality of the single-crystalline areas is high. In FT-IR reflectivity, an additional maximum showing up in the 900-1000 cm(-1) range is attributed to a probably distorted Al2O3 surface layer. In cathodoluminescence performed at 8 K, the samples show a broad luminescence band having its maximum varying between 3.45 eV and 3.85 eV as well as excitonic emission with transition energies of 6.03 eV, 5.93 eV and 5.82 eV. Remarkable variation in peak maximum and width of the broad band even within the same single-crystalline area is probably caused by local inhomogeneities originating from fluctuations in impurity, e.g. oxygen, or defects concentration. (c) 2005 WILEY-VCH Verlag GmbH & Co.
引用
收藏
页码:531 / 535
页数:5
相关论文
共 16 条
[1]   INFRARED LATTICE VIBRATIONS AND DIELECTRIC DISPERSION IN CORUNDUM [J].
BARKER, AS .
PHYSICAL REVIEW, 1963, 132 (04) :1474-+
[2]   Raman analysis of the E1 and A1 quasi-longitudinal optical and quasi-transverse optical modes in wurtzite AlN [J].
Bergman, L ;
Dutta, M ;
Balkas, C ;
Davis, RF ;
Christman, JA ;
Alexson, D ;
Nemanich, RJ .
JOURNAL OF APPLIED PHYSICS, 1999, 85 (07) :3535-3539
[3]   Structural, optical, and electrical properties of bulk AlN crystals grown by PVT [J].
Bickermann, M ;
Epelbaum, BM ;
Winnacker, A .
SILICON CARBIDE AND RELATED MATERIALS 2003, PRTS 1 AND 2, 2004, 457-460 :1541-1544
[4]   Characterization of bulk AlN with low oxygen content [J].
Bickermann, M ;
Epelbaum, BM ;
Winnacker, A .
JOURNAL OF CRYSTAL GROWTH, 2004, 269 (2-4) :432-442
[5]   Deformation potentials of the E1(TO) mode in AlN [J].
Darakchieva, V ;
Paskov, PP ;
Paskova, T ;
Birch, J ;
Tungasmita, S ;
Monemar, B .
APPLIED PHYSICS LETTERS, 2002, 80 (13) :2302-2304
[6]   Natural growth habit of bulk AlN crystals [J].
Epelbaum, BM ;
Seitz, C ;
Magerl, A ;
Bickermann, M ;
Winnacker, A .
JOURNAL OF CRYSTAL GROWTH, 2004, 265 (3-4) :577-581
[7]   Infrared reflectance analysis of GaN epitaxial layers grown on sapphire and silicon substrates [J].
Feng, ZC ;
Yang, TR ;
Hou, YT .
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2001, 4 (06) :571-576
[8]   Substrates for gallium nitride epitaxy [J].
Liu, L ;
Edgar, JH .
MATERIALS SCIENCE & ENGINEERING R-REPORTS, 2002, 37 (03) :61-127
[9]  
SARUA A, 2004, MAT RES SOC S P, V798
[10]   Fabrication of native, single-crystal AlN substrates [J].
Schowalter, LJ ;
Slack, GA ;
Whitlock, JB ;
Morgan, K ;
Schujman, SB ;
Raghothamachar, B ;
Dudley, M ;
Evans, KR .
5TH INTERNATIONAL CONFERENCE ON NITRIDE SEMICONDUCTORS (ICNS-5), PROCEEDINGS, 2003, 0 (07) :1997-2000