Structure and optical properties of ScN thin films

被引：42

作者：

Bai, XW

Kordesch, ME ^{[1
]}

机构：

[1] Ohio Univ, Dept Phys & Astron, Athens, OH 45701 USA

[2] Ohio Univ, CMSS Program, Athens, OH 45701 USA

来源：

APPLIED SURFACE SCIENCE | 2001年 / 175卷

关键词：

ScN; refractive index; bandgap;

D O I：

10.1016/S0169-4332(01)00165-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

More than 100 ScN films ranging from 50 to 1000 nm thickness on quartz, silicon acid sapphire substrates were grown by evaporation of Sc in the beam of an atomic nitrogen source and reactive sputtering from a Sc-metal target in a pure nitrogen atmosphere. ScN is the semiconductor. The refractive index in the infrared is n = 2.46 +/- 0.15 for thin film ScN and the bandgap is 2.26 eV. (C) 2001 Elsevier Science B.V. All rights reserved.

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页码：499 / 504

页数：6

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