Combination of a Besocke-type scanning tunneling microscope with a scanning electron microscope

The article describes the combination of a Besocke-type scanning tunneling microscope (STM) with a scanning electron microscope (SEM) in an ultrahigh vacuum (UHV) environment. The open design of the Besocke STM allows the SEM to be implemented as an add-on of a high resolution electron column and a secondary electron detector. The combined instrument is capable of atomic resolution imaging by STM and real time SEM imaging. SEM resolution down to about 80 nm was achieved. Simultaneous operation of STM and SEM is possible. The operation and performance of the combined instrument is illustrated by a variety of examples. Although the instrument is suitable for a wide range of applications where a combination of atomic resolution with lower magnification imaging is required, its operation in an UHV environment makes it particularly appropriate for the study of reactive metal surfaces. (C) 2001 American Institute of Physics.