Fabrication of metallic heat exchangers using sacrificial polymer mandrils

被引:29
作者
Arias, F [1 ]
Oliver, SRJ [1 ]
Xu, B [1 ]
Holmlin, RE [1 ]
Whitesides, GM [1 ]
机构
[1] Harvard Univ, Dept Chem & Biol Chem, Cambridge, MA 02138 USA
基金
美国国家卫生研究院; 加拿大自然科学与工程研究理事会; 美国国家科学基金会;
关键词
electrodeposition; fabrication; heat exchangers; microelectromechanical devices; molding; soft lithography;
D O I
10.1109/84.911098
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper demonstrates the use of poly(dimethylsiloxane) (PDMS), polyurethane (PU), epoxy, and poly(methyl methacrylate) (PMMA) as mandrils to fabricate metallic heat exchangers having 300-700 mum internal channels. The mandrils were prepared using two soft lithographic techniques-replica molding, and microembossing. To fabricate the heat exchangers, the polymeric mandrils were coated with a thin layer of metal by thermal evaporation or sputtering; this layer acted as the cathode for electrodeposition of a shell of nickel or copper that was 100 mum thick. The polymers were removed by burning them out at 400 degreesC in air, or by dissolving them with a tetrahydrofuran solution of tetrabutylammonium fluoride. Studies of heat dissipation showed that the nickel heat exchangers with features that range in size from 150-750 mum have thermal resistances ranging from 0.07 to 0.12 degrees C-2 W-1 cm at flow rates of water of similar to 20 L h(-1) and pressures of 8.6-83 x 10(3) N m(-2).
引用
收藏
页码:107 / 112
页数:6
相关论文
共 27 条
[1]   Microorigami: Fabrication of small, three-dimensional, metallic structures [J].
Brittain, ST ;
Schueller, OJA ;
Wu, HK ;
Whitesides, S ;
Whitesides, GM .
JOURNAL OF PHYSICAL CHEMISTRY B, 2001, 105 (02) :347-350
[2]   Imprint lithography with 25-nanometer resolution [J].
Chou, SY ;
Krauss, PR ;
Renstrom, PJ .
SCIENCE, 1996, 272 (5258) :85-87
[3]   MATERIALS FOR OPTICAL-DATA STORAGE [J].
EMMELIUS, M ;
PAWLOWSKI, G ;
VOLLMANN, HW .
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 1989, 28 (11) :1445-1471
[4]  
Jackman RJ, 1999, CHEMTECH, V29, P18
[5]   Three-dimensional metallic microstructures fabricated by soft lithography and microelectrodeposition [J].
Jackman, RJ ;
Brittain, ST ;
Adams, A ;
Wu, HK ;
Prentiss, MG ;
Whitesides, S ;
Whitesides, GM .
LANGMUIR, 1999, 15 (03) :826-836
[6]   Design and fabrication of topologically complex, three-dimensional microstructures [J].
Jackman, RJ ;
Brittain, ST ;
Adams, A ;
Prentiss, MG ;
Whitesides, GM .
SCIENCE, 1998, 280 (5372) :2089-2091
[7]   Microfabrication inside capillaries using multiphase laminar flow patterning [J].
Kenis, PJA ;
Ismagilov, RF ;
Whitesides, GM .
SCIENCE, 1999, 285 (5424) :83-85
[8]   FINE PATTERNING OF THIN SOL-GEL FILMS [J].
KRUG, H ;
MERL, N ;
SCHMIDT, H .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1992, 147 :447-450
[9]   SU-8: a low-cost negative resist for MEMS [J].
Lorenz, H ;
Despont, M ;
Fahrni, N ;
LaBianca, N ;
Renaud, P ;
Vettiger, P .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1997, 7 (03) :121-124
[10]   Three-dimensional microfabrication by localized electrochemical deposition [J].
Madden, JD ;
Hunter, IW .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1996, 5 (01) :24-32