Direct measurement of Leff and channel profile in MOSFETs using 2-D carrier profiling techniques

被引:16
作者
De Wolf, P [1 ]
Stephenson, R [1 ]
Biesemans, S [1 ]
Jansen, P [1 ]
Badenes, G [1 ]
De Meyer, K [1 ]
Vandervorst, W [1 ]
机构
[1] Digital Instruments, Santa Barbara, CA 93117 USA
来源
INTERNATIONAL ELECTRON DEVICES MEETING 1998 - TECHNICAL DIGEST | 1998年
关键词
D O I
10.1109/IEDM.1998.746420
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Different two-dimensional (2-D) carrier profiling tools, based on contact-mode atomic force microscopy (AFM), have been used to investigate the details in the lateral and vertical distribution of the carriers in nMOSFET devices with identical channel profile (4e17 atoms/cm(3)) and gate oxide thickness (5.5 nm) but with different S/D architectures, all relevant for 0.25 mu m CMOS technology (see Table 1). These characterization techniques are: scanning capacitance microscopy (SCM) [1] and scanning spreading resistance microscopy (SSRM) [2]. Two typical 2-D case studies are presented. In the first one, the effective gate length is determined. The measured values are compared with the ones measured by extraction from the electrical characteristics using a modified Shift & Ratio method [3]. In the second study, the vertical channel profile through the centre of the gate is studied as a function of the gate length. Hereby, for the first time, transient enhanced diffusion (TED) effects are directly observed. This type of profile information is not accessible using standard 1-D profiling techniques such as SIMS, SRP, or C-V profiling.
引用
收藏
页码:559 / 562
页数:4
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