Compositional characterization of CrN films deposited by ion beam-assisted deposition process on stainless steel

Thin films of technologically important chromium nitride, prepared using ion beam-assisted deposition (IBAD) on stainless steel, have been characterized for their composition and thickness by backscattering spectrometry and glow discharge mass spectrometry (GDMS). The composition of the films was determined by non-resonant N-14(p,p)N-14 backscattering using 1.6-1.73 MeV protons. The proton resonance N-14(p,p)N-14 scattering at E-p = 1.74 MeV and 3 MeV alpha -particle backscattering were used to measure the thickness of the films. The composition and thickness of the films estimated by the GDMS method are consistent with backscattering measurements. The factors leading to the formation of the peak observed at the iron edge of the: substrate in the backscattered spectra for both projectiles have been investigated. (C) 2001 Published by Elsevier Science B,V. All rights reserved.