ANALYSIS OF THIN METALLIC-FILMS BY GLOW-DISCHARGE MASS-SPECTROMETRY

被引：24

作者：

HECQ, M

HECQ, A

FONTIGNIES, M

机构：

来源：

ANALYTICA CHIMICA ACTA | 1983年 / 155卷 / DEC期

关键词：

D O I：

10.1016/S0003-2670(00)85592-0

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：191 / 198

页数：8

共 22 条

[1] SAMPLING A HOLLOW-CATHODE DISCHARGE WITH A QUADRUPOLE MASS FILTER [J].

BENTZ, BL ;

BRUHN, CG ;

HARRISON, WW .

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1978, 28 (04) :409-425

[2] PLASMA DIAGNOSTICS OF AN RF-SPUTTERING GLOW DISCHARGE [J].

COBURN, JW ;

KAY, E .

APPLIED PHYSICS LETTERS, 1971, 18 (10) :435-&

[3] POSITIVE-ION BOMBARDMENT OF SUBSTRATES IN RF DIODE GLOW-DISCHARGE SPUTTERING [J].

COBURN, JW ;

KAY, E .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) :4965-4971

[4] GLOW-DISCHARGE MASS-SPECTROMETRY - TECHNIQUE FOR DETERMINING ELEMENTAL COMPOSITION PROFILES IN SOLIDS [J].

COBURN, JW ;

TAGLAUER, E ;

KAY, E .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (04) :1779-1786

[5] PLASMA SOURCES IN ANALYTICAL MASS-SPECTROMETRY [J].

COBURN, JW ;

HARRISON, WW .

APPLIED SPECTROSCOPY REVIEWS, 1981, 17 (01) :95-164

[6] PRESSURE CONSIDERATIONS ASSOCIATED WITH ION SAMPLING FROM GLOW DISCHARGES [J].

COBURN, JW ;

KAY, E .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (06) :738-&

[7] ION ENERGIES AT CATHODE OF A GLOW DISCHARGE [J].

DAVIS, WD ;

VANDERSLICE, TA .

PHYSICAL REVIEW, 1963, 131 (01) :219-&

[8] DIAGNOSTICS OF AN RF SPUTTERING GLOW DISCHARGE, CORRELATION BETWEEN ATOMIC-ABSORPTION AND MASS-SPECTROMETRY [J].

ECKSTEIN, EW ;

COBURN, JW ;

KAY, E .

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1975, 17 (02) :129-138

[9] MASS-SPECTROMETRIC MONITORING OF IONS IN PLASMAS AND SWARMS [J].

HASTED, JB .

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1975, 16 (1-2) :3-14

[10]

HASTED JB, 1972, PHYSICS ATOMIC COLLI, P621

← 1 2 3 →