Back-illuminated GaN/AlGaN heterojunction photodiodes with high quantum efficiency and low noise

被引:79
作者
Yang, W [1 ]
Nohova, T [1 ]
Krishnankutty, S [1 ]
Torreano, R [1 ]
McPherson, S [1 ]
Marsh, H [1 ]
机构
[1] Honeywell Technol Ctr, Plymouth, MN 55441 USA
关键词
D O I
10.1063/1.122092
中图分类号
O59 [应用物理学];
学科分类号
摘要
Back-illuminated GaN/AlGaN ultraviolet (UV) heterojunction photodiodes with high quantum efficiencies are demonstrated. Photovoltaic (zero bias) responsivity of 0.2 A/W at 355 nm was achieved. The improved efficiencies primarily arise from the use of AlGaN/GaN heterojunction in which photons are absorbed within the p-n junction thus eliminates carrier losses due to surface recombination and diffusion processes in previously reported homojunction devices. Very high dark impedance and large visible rejection ratio were obtained. These results indicate high quality GaN/AlGaN interface and efficient photocarrier collection in the photodiode. (C) 1998 American Institute of Physics. [S0003-6951(98)00534-8].
引用
收藏
页码:1086 / 1088
页数:3
相关论文
共 8 条
[1]   Microcavity effects in GaN epitaxial films and in Ag/GaN/sapphire structures [J].
Billeb, A ;
Grieshaber, W ;
Stocker, D ;
Schubert, EF ;
Karlicek, RF .
APPLIED PHYSICS LETTERS, 1997, 70 (21) :2790-2792
[2]   VISIBLE-BLIND ULTRAVIOLET PHOTODETECTORS BASED ON GAN P-N-JUNCTIONS [J].
CHEN, Q ;
KHAN, MA ;
SUN, CJ ;
YANG, JW .
ELECTRONICS LETTERS, 1995, 31 (20) :1781-1782
[3]   Schottky barrier detectors on GaN for visible-blind ultraviolet detection [J].
Chen, Q ;
Yang, JW ;
Osinsky, A ;
Gangopadhyay, S ;
Lim, B ;
Anwar, MZ ;
Khan, MA ;
Kuksenkov, D ;
Temkin, H .
APPLIED PHYSICS LETTERS, 1997, 70 (17) :2277-2279
[4]  
Dmitriev VA, 1996, APPL PHYS LETT, V68, P229, DOI 10.1063/1.116469
[5]   Low noise p-pi-n GaN ultraviolet photodetectors [J].
Osinsky, A ;
Gangopadhyay, S ;
Gaska, R ;
Williams, B ;
Khan, MA ;
Kuksenkov, D ;
Temkin, H .
APPLIED PHYSICS LETTERS, 1997, 71 (16) :2334-2336
[6]   Ultraviolet-sensitive, visible-blind GaN photodiodes fabricated by molecular beam epitaxy [J].
VanHove, JM ;
Hickman, R ;
Klaassen, JJ ;
Chow, PP ;
Ruden, PP .
APPLIED PHYSICS LETTERS, 1997, 70 (17) :2282-2284
[7]   High speed, low noise ultraviolet photodetectors based on GaN p-i-n and AlGaN(p)-GaN(i)-GaN(n) structures [J].
Xu, GY ;
Salvador, A ;
Kim, W ;
Fan, Z ;
Lu, C ;
Tang, H ;
Morkoc, H ;
Smith, G ;
Estes, M ;
Goldenberg, B ;
Yang, W ;
Krishnankutty, S .
APPLIED PHYSICS LETTERS, 1997, 71 (15) :2154-2156
[8]  
YANG W, 1998, F3361595C1618 WRIGHT