Laser-induced forward transfer of focussed ion beam pre-machined donors

被引：15

作者：

Kaur, K. S. ^{[1
]}

Feinaeugle, M. ^{[1
]}

Banks, D. P. ^{[1
]}

Ou, J. Y. ^{[1
]}

Di Pietrantonio, F. ^{[2
]}

Verona, E. ^{[2
]}

Sones, C. L. ^{[1
]}

Eason, R. W. ^{[1
]}

机构：

[1] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England

[2] CNR 100, Inst Acoust & Sensors, I-00133 Rome, Italy

来源：

APPLIED SURFACE SCIENCE | 2011年 / 257卷 / 15期

基金：

英国工程与自然科学研究理事会;

关键词：

Laser induced forward transfer (LIFT); Focussed ion beam (FIB); ZnO; DRL; DEPOSITION;

D O I：

10.1016/j.apsusc.2011.02.094

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this paper we report femtosecond laser-induced forward transfer (LIFT) of pre-machined donor films. 1 mu m thick zinc oxide (ZnO) films were first machined using the focussed ion beam (FIB) technique up to a depth of 0.8 mu m. Debris-free micro-pellets of ZnO with extremely smooth edges and surface uniformity were subsequently printed from these pre-machined donors using LIFT. Printing results of non-machined ZnO donor films and films deposited on top of a polymer dynamic release layer (DRL) are also presented for comparison, indicating the superior quality of transfer achievable and utility of this pre-machining technique. (C) 2011 Elsevier B. V. All rights reserved.

引用

页码：6650 / 6653

页数：4

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