Capacitance estimate for electrostatically actuated narrow microbeams

被引:60
作者
Batra, R. C. [1 ]
Porfiri, M. [2 ]
Spinello, D. [1 ]
机构
[1] Virginia Polytech Inst & State Univ, Dept Engn Sci & Mech, Blacksburg, VA 24061 USA
[2] Polytech Univ, Dept Mech Aerosp & Mfg Engn, Brooklyn, NY 11201 USA
关键词
D O I
10.1049/mnl:20065046
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A novel estimate for the line-to-ground capacitance that accurately predicts the pull-in instability parameters for narrow electrostatically actuated microbeams is proposed. Parameters in the proposed formula are obtained by least square fitting data from a fully converged numerical solution with the method of moments. For a narrow microbeam, it is shown that the new formula significantly improves upon classical formulas that neglect fringing field effects due to the finite thickness of the microbeam cross-section.
引用
收藏
页码:71 / 73
页数:3
相关论文
共 11 条