Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions

被引:326
作者
Pamidighantam, S
Puers, R
Baert, K
Tilmans, HAC
机构
[1] IMEC, MCP, MEMS, B-3001 Louvain, Belgium
[2] Katholieke Univ Leuven, Dept ESAT, B-3001 Louvain, Belgium
关键词
D O I
10.1088/0960-1317/12/4/319
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, a closed-form expression for the pull-in voltage of fixed-fixed beams and fixed-free beams is derived starting from the known expression of a simple lumped spring-mass system. The effects of partial electrode configuration, of axial stress, non-linear stiffening, charge re-distribution and fringing fields are all included in the final expression. Further, the results obtained are summarized and validated with other existing empirical and analytical models as well as with finite element simulation results. The model agrees well with finite element simulation results obtained with COVENTORWARE software.
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页码:458 / 464
页数:7
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