CF4 decompositions using streamer- and glow-mode in dielectric barrier discharges

被引：22

作者：

Kim, Y ^{[1
]}

Kim, KT

Cha, MS

Song, YH

Kim, SJ

机构：

[1] Korea Inst Machinery & Mat, Taejon 305343, South Korea

[2] Los Alamos Natl Lab, Plasma Phys Grp, Los Alamos, NM 87545 USA

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 2005年 / 33卷 / 03期

关键词：

CF4; decomposition; dielectric barrier discharge; glow; perforated DBD; streamer;

D O I：

10.1109/TPS.2005.848616

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A Dielectric barrier discharge (DBD) is a promising candidate to remove carbon tetrafluoride (CF4) because the DBD has been successfully used for generating ozone (O-3) and decomposing nitrogen oxide (NO). A streamer- and glow-mode operations of DBD were carried out in a coaxial cylinder reactor by coupling 10-kHz alternate current (ac) power. The effect of oxygen on the CF4 decompositions was investigated and the optimum oxygen concentrations were found. We compared N-2-streamer, N-2-glow, and He-glow modes operated in a DBD to investigate the effect of plasma mode on CF4 removal. The results showed that the most efficient CF4 removal was obtained in He-glow mode, while N-2-streamer and N-2-glow modes demonstrated similar performances. With a practical point of view, we investigated an optimized geometrical configuration of streamer discharge. A micro hole-size perforated DBD showed significant increases in CF4 removal efficiency compared to the normal N2-streamer mode.

引用

页码：1041 / 1046

页数：6

共 14 条

[1]

CHA MS, 2003, P 16 INT S PLASM CHE

[2] Reduction of perfluorocompound emissions by microwave plasma-torch [J].