Direct Low-Temperature Nanographene CVD Synthesis over a Dielectric Insulator

被引:301
作者
Ruemmeli, Mark H. [1 ,2 ]
Bachmatiuk, Alicja [1 ]
Scott, Andrew [1 ,3 ,4 ]
Boerrnert, Felix [1 ]
Warner, Jamie H. [5 ]
Hoffman, Volker [1 ]
Lin, Jarrn-Horng [6 ]
Cuniberti, Gianaurelio [3 ,4 ]
Buechner, Bernd [1 ]
机构
[1] IFW Dresden, D-01171 Dresden, Germany
[2] Tech Univ Dresden, Dept Phys, D-01062 Dresden, Germany
[3] Tech Univ Dresden, Inst Mat Sci, D-01062 Dresden, Germany
[4] Tech Univ Dresden, Max Bergmann Ctr Biomat, D-01062 Dresden, Germany
[5] Univ Oxford, Dept Mat, Oxford OX1 3PH, England
[6] Natl Univ Tainan, Dept Mat Sci, Tainan 700, Taiwan
关键词
graphene; chemical vapor deposition; transmission electron microscopy; synthesis; catalysis; CHEMICAL-VAPOR-DEPOSITION; CATALYST-FREE GROWTH; CARBON NANOTUBES; GRAPHENE; GRAPHITIZATION;
D O I
10.1021/nn100971s
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Graphene ranks highly as a possible material for future high-speed and flexible electronics. Current fabrication routes, which rely on metal substrates, require post-synthesis transfer of the graphene onto a Si wafer, or in the case of epitaxial growth on SiC, temperatures above 1000 degrees C are required. Both the handling difficulty and high temperatures are not best suited to present day silicon technology. We report a facile chemical vapor deposition approach in which nanographene and few-layer nanographene are directly formed over magnesium oxide and can be achieved at temperatures as low as 325 degrees C.
引用
收藏
页码:4206 / 4210
页数:5
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