A sub-50 meV spectrometer and energy filter for use in combination with 200 kV monochromated (S)TEMs

被引:41
作者
Brink, HA [1 ]
Barfels, MMG [1 ]
Burgner, RP [1 ]
Edwards, BN [1 ]
机构
[1] Gatan Res & Dev, Pleasanton, CA 94588 USA
关键词
EELS; spectrometer; aberration correction; high-stability;
D O I
10.1016/S0304-3991(03)00102-5
中图分类号
TH742 [显微镜];
学科分类号
摘要
A high-energy resolution post-column spectrometer for the purpose of electron energy loss spectroscopy (EELS) and energy-filtered TEM in combination with a monochromated (S)TEM is presented. The prism aberrations were corrected up to fourth order using multipole elements improving the electron optical energy resolution and increasing the acceptance of the spectrometer for a combination of object area and collection angles. Electronics supplying the prism, drift tube, high-tension reference and critical lenses have been newly designed such that, in coiribination with the new electron optics, a sub-50 meV energy resolution has been realized, a 10-fold improvement over past post-column spectrometer designs. The first system has been installed on a 200 kV monochromated TEM at the Delft University of Technology. Total system energy resolution of sub-100 meV has been demonstrated. For a 1 s exposure the resolution degraded to 110meV as a result of noise. No further degradation in energy resolution was measured for exposures Lip to 1 min at 120 kV. Spectral resolution measurements, performed on the pi* peak of the BN K-edge, demonstrated a 350 meV (FWHM) peak width at 200 kV. This measure is predominantly determined by the natural line width of the BN K-edge. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:367 / 384
页数:18
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