Using FIB-processed AFM cantilevers to determine microtribology characteristics

被引：8

作者：

Ando, Y

Nagashima, T

Kakuta, K

机构：

[1] Mech Engn Lab, Micromechanisms Div, Tsukuba, Ibaraki 3058564, Japan

[2] Chuo Univ, Bunkyo Ku, Tokyo 1128551, Japan

来源：

TRIBOLOGY LETTERS | 2000年 / 9卷 / 1-2期

关键词：

atomic force microscope; wear; contact area; pull-off force; friction force; parallel leaf spring; relative humidity; focused ion beam;

D O I：

10.1023/A:1018892007915

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

Microtribology characteristics were determined by using a combination of single asperities and three types of FIB (focused ion beam)-processed cantilevers for AFM (atomic force microscope). First, single gold asperities were rubbed with single and parallel leaf springs. For the parallel leaf spring, the pull-off force was proportional to the worn area of the gold asperity peak. The total volume of the gold asperity only slightly changed with rubbing. Second, the friction force on a worn asperity was measured by using a double parallel leaf spring, and the results showed that the friction force was proportional to the sum of the normal load and the pull-off force.

引用

页码：15 / 23

页数：9

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