High aspect-ratio polymer nanostructures by tailored capillarity and adhesive force

被引：35

作者：

Jeong, Hoon Eui ^{[1
]}

Lee, Sung Hoon ^{[1
]}

Kim, Pinam ^{[1
]}

Suh, Kahp Y. ^{[1
,2
]}

机构：

[1] Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South Korea

[2] Seoul Natl Univ, Inst Adv Machinery & Design, Seoul 151742, South Korea

来源：

COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS | 2008年 / 313卷

关键词：

nanofabrication; capillarity; adhesive force; high aspect ratio; nanohairs; LITHOGRAPHY; FABRICATION; MICRO;

D O I：

10.1016/j.colsurfa.2007.04.163

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We present simple methods for fabricating high aspect-ratio polymer nanostructures on a solid substrate by rigiflex lithography with tailored capillarity and adhesive force. In the first method, a thin, thermoplastic polymer film was prepared by spin coating on a substrate and the temperature was raised above the polymer's glass transition temperature (T-g) while in conformal contact with a poly(urethane acrylate) (PUA) mold having nanocavities. Consequently, capillarity forces the polymer film to rise into the void space of the mold, resulting in nanostructures with an aspect ratio of similar to 4. In the second method, very high aspect-ratio (>20) nanohairs were fabricated by elongating the pre-formed nanostructures upon removal of the mold with the aid of tailored capillarity and adhesive force at the mold/polymer interface. Finally, these two methods were further used to fabricate micro/nano hierarchical structures by sequential application of the molding process for mimicking nature's functional surfaces such as a lotus leaf and gecko foot hairs. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：359 / 364

页数：6

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