共 17 条
[4]
Fabrication of three-dimensional photonic structures with submicrometer resolution by x-ray lithography
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2000, 18 (06)
:3505-3509
[5]
Fabrication of three-dimensional microstructures by high resolution x-ray lithography
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1999, 17 (06)
:3444-3448
[7]
GALLI M, 2002, PHYS REV B, V65
[8]
Joannopoulus J. D., 1995, PHOTONIC CRYSTALS
[9]
UPDATED SYSTEM MODEL FOR X-RAY-LITHOGRAPHY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1994, 12 (06)
:3930-3935
[10]
KHAN M, 1997, CNTECH TOOLSET USERS