Fabrication of 3D metallic photonic crystals by X-ray lithography

被引:36
作者
Romanato, F
Businaro, L
Vaccari, L
Cabrini, S
Candeloro, P
De Vittorio, M
Passaseo, A
Todaro, MT
Cingolani, R
Cattaruzza, E
Galli, M
Andreani, C
Di Fabrizio, E
机构
[1] INFM, TASC, NNL, I-34012 Trieste, Italy
[2] Univ Lecce, INFM, NNL, Dipartimento Ingn Innovaz, I-73100 Lecce, Italy
[3] INFM, Dipartimento Chim Fis, I-30123 Venice, Italy
[4] Univ Pavia, INFM, I-27100 Pavia, Italy
[5] Univ Pavia, Dipartimento Fis A Volta, I-27100 Pavia, Italy
关键词
3D photonic crystals; X-ray lithography;
D O I
10.1016/S0167-9317(03)00104-7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Photonic crystals (3D) represent one of the most important building blocks towards the achievement of a full optics communication technology. So far the largest interest has been attracted by two-dimensional photonic crystals because they are potentially more amenable to fabrication and much closer to application. Straightforward application of the photonic band gap concept is generally thought to require three-dimensional (3D) photonic crystals that, however, represent a challenge from a fabrication point of view. Recent works have shown that 3D metallic PC can be fabricated and that they can be advantageous in the low frequency region where the metals become almost completely reflectors. In this work we show the possibility to fabricate 3D PC structures by X-ray lithography. Gold and nickel 3D photonic crystals with threefold (Yablonovite) and fourfold rotation symmetry have been fabricated with a lattice parameter ranging from 1 mum down to 300 nm. The total thickness of the 3D PC is of the order of 10 mum, a value which should allow to achieve a complete bulk behavior. This is supported by variable angle reflectance measurements, which have shown clear indications for true 3D dimensionality of our samples. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:479 / 486
页数:8
相关论文
共 17 条
[1]   Photonic band-structure effects in the reflectivity of periodically patterned waveguides [J].
Astratov, VN ;
Whittaker, DM ;
Culshaw, IS ;
Stevenson, RM ;
Skolnick, MS ;
Krauss, TF ;
De La Rue, RM .
PHYSICAL REVIEW B, 1999, 60 (24) :16255-16258
[2]   PHOTONIC BAND-STRUCTURE INVESTIGATION OF 2-DIMENSIONAL BRAGG REFLECTOR MIRRORS FOR SEMICONDUCTOR-LASER MODE CONTROL [J].
BULLOCK, DL ;
SHIH, CC ;
MARGULIES, RS .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1993, 10 (02) :399-403
[3]   Fabrication of photonic crystals for the visible spectrum by holographic lithography [J].
Campbell, M ;
Sharp, DN ;
Harrison, MT ;
Denning, RG ;
Turberfield, AJ .
NATURE, 2000, 404 (6773) :53-56
[4]   Fabrication of three-dimensional photonic structures with submicrometer resolution by x-ray lithography [J].
Cuisin, C ;
Chelnokov, A ;
Lourtioz, JM ;
Decanini, D ;
Chen, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (06) :3505-3509
[5]   Fabrication of three-dimensional microstructures by high resolution x-ray lithography [J].
Cuisin, C ;
Chen, Y ;
Decanini, D ;
Chelnokov, A ;
Carcenac, F ;
Madouri, A ;
Lourtioz, JM ;
Launois, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (06) :3444-3448
[6]   All-metallic three-dimensional photonic crystals with a large infrared bandgap [J].
Fleming, JG ;
Lin, SY ;
El-Kady, I ;
Biswas, R ;
Ho, KM .
NATURE, 2002, 417 (6884) :52-55
[7]  
GALLI M, 2002, PHYS REV B, V65
[8]  
Joannopoulus J. D., 1995, PHOTONIC CRYSTALS
[9]   UPDATED SYSTEM MODEL FOR X-RAY-LITHOGRAPHY [J].
KHAN, M ;
MOHAMMAD, L ;
XIAO, J ;
OCOLA, L ;
CERRINA, F .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (06) :3930-3935
[10]  
KHAN M, 1997, CNTECH TOOLSET USERS