Cr-inserted TiO2 thin films for chemical gas sensors

被引：48

作者：

Alessandri, Ivano

Comini, Elisabetta

Bontempi, Elza

Faglia, Guido

Depero, Laura E.

Sberveglieri, Giorgio

机构：

[1] Univ Brescia, LATEMAR, INSTM, I-25123 Brescia, Italy

[2] Univ Brescia, Chem Technol Lab, I-25123 Brescia, Italy

[3] Univ Brescia, CNR, INFM, I-25123 Brescia, Italy

[4] Univ Brescia, Sensor Lab, I-25123 Brescia, Italy

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2007年 / 128卷 / 01期

关键词：

Cr-inserted TiO2; gas sensors; CO; ethanol; XRF microanalysis; GIXRD;

D O I：

10.1016/j.snb.2007.06.020

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Cr-Ti oxide thin films were prepared by rf sputtering of Cr-inserted Ti targets. The roles played by Cr content and thermal treatments on both the structure and the electrical conductivity of thin films were investigated. Selected series of samples were tested as sensors for different gases like carbon monoxide and ethanol. In both the cases. samples exhibiting the best sensing performances were determined and possible correlations between structure and electrical properties were evidenced. (c) 2007 Elsevier B.V. All rights reserved.

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页码：312 / 319

页数：8

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