Mode control of vertical-cavity surface-emitting lasers by germanium coating

被引:7
作者
Chiou, SW
Lin, G
Lee, CP
Yang, HP
Sung, CP
机构
[1] Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu 30010, Taiwan
[2] Ind Technol Res Inst, Optelect & Syst Labs, Hsinchu 310, Taiwan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2001年 / 40卷 / 2A期
关键词
VCSEL; single-mode; proton implant; AR coating;
D O I
10.1143/JJAP.40.614
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have successfully developed a selective surface coating technique to control the modal behavior of the ion-implanted vertical-cavity surface-emitting laser (VCSEL). With selective deposition of a germanium coating by the lift-off process, we could spatially control the threshold gain condition of the VCSEL to support the single transverse mode. The threshold current is 7 mA and single transverse mode operation is maintained up to I mW. The method is simple and nondestructive compared with other techniques.
引用
收藏
页码:614 / 616
页数:3
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