Two-dimensional waveguide based photonic microstructures in GaAs and InP

被引：21

作者：

Krauss, TF

Smith, CJM

Vogele, B

Murad, SK

Wilkinson, CDW

Grant, RS

Burt, MG

DeLaRue, RM

机构：

[1] Dept. of Electronics and Elec. Eng., University of Glasgow

[2] BT Laboratories, Martlesham Heath

来源：

MICROELECTRONIC ENGINEERING | 1997年 / 35卷 / 1-4期

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

10.1016/S0167-9317(96)00127-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The fabrication and characterisation of two-dimensional photonic microstructures with a period of 190 nm exhibiting clear photonic bandgap effects is reported. We show that structures with near-perfect sixfold rotational symmetry are produced by electron-beam lithography and transferred into the material by dry etching with high aspect ratio.

引用

页码：29 / 32

页数：4