High-rate dual-target DC magnetron sputter deposition of "blue" electrochromic Mo oxide films

被引：12

作者：

Kharrazi, M ^{[1
]}

Kullman, L ^{[1
]}

Granqvist, CG ^{[1
]}

机构：

[1] Univ Uppsala, Dept Mat Sci, S-75121 Uppsala, Sweden

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 1998年 / 53卷 / 3-4期

关键词：

electrochromism; thin films; sputter deposition; molybdenum oxide; smart windows;

D O I：

10.1016/S0927-0248(98)00033-6

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Mo oxide films were prepared by dual-target reactive DC magnetron sputtering under conditions leading to films that were blue in as-deposited state. The deposition rate for this "blue" Mo oxide was as high as 1.5 nm/s, to be compared to similar to 0.85 and similar to 0.1 nm/s for highly transparent Mo oxide films made with dual-target and single-target sputtering, respectively. Good electrochromic properties of the "blue" films evolved after similar to 5 colour/bleach cycles in a Li+ conducting electrolyte. (C) 1998 Elsevier Science B.V. All rights reserved.

引用

页码：349 / 356

页数：8

共 35 条

[1] ZIRCONIUM NITRIDE BASED TRANSPARENT HEAT MIRROR COATINGS - PREPARATION AND CHARACTERIZATION [J].