INFRARED OPTICAL-PROPERTIES OF SILICON OXYNITRIDE FILMS - EXPERIMENTAL-DATA AND THEORETICAL INTERPRETATION

被引：145

作者：

ERIKSSON, TS

GRANQVIST, CG

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 06期

关键词：

D O I：

10.1063/1.337212

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2081 / 2091

页数：11

共 59 条

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