An improved wedge calibration method for lateral force in atomic force microscopy

被引：353

作者：

Varenberg, M ^{[1
]}

Etsion, I ^{[1
]}

Halperin, G ^{[1
]}

机构：

[1] Technion Israel Inst Technol, Dept Mech Engn, IL-32000 Haifa, Israel

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2003年 / 74卷 / 07期

关键词：

D O I：

10.1063/1.1584082

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An improved wedge calibration method for quantitative lateral force measurement in atomic force microscopy is presented. The improved method differs from the original one in several aspects. It utilizes a much simpler, commercially available, calibration grating and can be performed at any single specified applied load. It enables calibration of all types of probes, both integrated with sharp tips, and colloidal with any radius of curvature up to 2 mum. The improved method also simplifies considerably the calculation of the calibration factor by using flat facets on the calibration grating to cancel out system errors. A scheme for the data processing for on-line calibration of the lateral force is also presented. (C) 2003 American Institute of Physics.

引用

页码：3362 / 3367

页数：6

共 18 条

[1]

[Anonymous], 1996, MECH DESIGN HDB

[2] Tip friction - torsional spring constant determination [J].

Bogdanovic, G ;

Meurk, A ;

Rutland, MW .

COLLOIDS AND SURFACES B-BIOINTERFACES, 2000, 19 (04) :397-405

[3] Force calibration in lateral force microscopy [J].

Cain, RG ;

Biggs, S ;

Page, NW .

JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2000, 227 (01) :55-65

[4] Quantitative comparison of three calibration techniques for the lateral force microscope [J].

Cain, RG ;

Reitsma, MG ;

Biggs, S ;

Page, NW .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2001, 72 (08) :3304-3312

[5] Lateral stiffness: A new nanomechanical measurement for the determination of shear strengths with friction force microscopy [J].

Carpick, RW ;

Ogletree, DF ;

Salmeron, M .

APPLIED PHYSICS LETTERS, 1997, 70 (12) :1548-1550

[6] A NONDESTRUCTIVE METHOD FOR DETERMINING THE SPRING CONSTANT OF CANTILEVERS FOR SCANNING FORCE MICROSCOPY [J].

CLEVELAND, JP ;

MANNE, S ;

BOCEK, D ;

HANSMA, PK .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (02) :403-405

[7] Calibration of the torsional spring constant and the lateral photodiode response of frictional force microscopes [J].

Feiler, A ;

Attard, P ;

Larson, I .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (07) :2746-2750

[8] INSITU FRICTION AND WEAR MEASUREMENTS IN INTEGRATED POLYSILICON MECHANISMS [J].

GABRIEL, KJ ;

BEHI, F ;

MAHADEVAN, R ;

MEHREGANY, M .

SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :184-188

[9] Adhesion in elastic-plastic spherical microcontact [J].

Kogut, L ;

Etsion, I .

JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2003, 261 (02) :372-378

[10] Lateral stiffness of the tip and tip-sample contact in frictional force microscopy [J].

Lantz, MA ;

OShea, SJ ;

Hoole, ACF ;

Welland, ME .

APPLIED PHYSICS LETTERS, 1997, 70 (08) :970-972

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