Stretchable Field-Effect-Transistor Array of Suspended SnO2 Nanowires

被引:71
作者
Shin, Gunchul [3 ]
Yoon, Chang Hoon [3 ]
Bae, Min Young [3 ]
Kim, Yoon Chul [3 ]
Hong, Sahng Ki [3 ]
Rogers, John A. [1 ,2 ]
Ha, Jeong Sook [3 ]
机构
[1] Univ Illinois, Dept Mat Sci & Engn, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USA
[2] Univ Illinois, Beckman Inst Adv Sci & Technol, Urbana, IL 61801 USA
[3] Korea Univ, Dept Chem & Biol Engn, Seoul 136701, South Korea
关键词
SILICON INTEGRATED-CIRCUITS; ELECTRONICS; OPTOELECTRONICS; NETWORKS; DESIGNS;
D O I
10.1002/smll.201100116
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Stretchable device systems with suspended SnO2 nanowires (NWs) as channel materials: Oxygen plasma is used to remove the underlying polymer to float the NWs. These suspended NW field-effect transistors exhibit high electrical performance. By adopting a neutral mechanical plane and curved interconnection, electrical performance of the suspended NW field-effect transistors is maintained under stretching up to approximately 40%. © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:1181 / 1185
页数:5
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