Micromechanics and Advanced Designs for Curved Photodetector Arrays in Hemispherical Electronic-Eye Cameras

被引:104
作者
Shin, Gunchul [2 ]
Jung, Inhwa [3 ,4 ]
Malyarchuk, Viktor [3 ,4 ]
Song, Jizhou [5 ]
Wang, Shuodao [1 ]
Ko, Heung Cho [3 ,4 ]
Huang, Yonggang [1 ]
Ha, Jeong Sook [2 ]
Rogers, John A. [3 ,4 ]
机构
[1] Northwestern Univ, Dept Mech Engn, Dept Civil & Environm Engn, Evanston, IL 60208 USA
[2] Korea Univ, Dept Chem & Biol Engn, Seoul 136701, South Korea
[3] Univ Illinois, Dept Mat Sci & Engn, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USA
[4] Univ Illinois, Beckman Inst Adv Sci & Technol, Urbana, IL 61801 USA
[5] Univ Miami, Dept Mech & Aerosp Engn, Coral Gables, FL 33146 USA
基金
美国国家科学基金会;
关键词
compressible electronics; elastomeric transfer; electronic eye cameras; micromechanics; silicon membranes; SURFACES; CIRCUITS;
D O I
10.1002/smll.200901350
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The fabrication of a hemispherical electronic-eye camera with optimized designs based upon micromechanical analysis is reported. The photodetector arrays combine layouts with multidevice tiles and extended, non-coplanar interconnects to improve the fill factor and deformability, respectively. Quantitative comparison to micromechanics analysis reveals the key features of these designs. Color images collected with working cameras demonstrate the utility of these approaches.
引用
收藏
页码:851 / 856
页数:6
相关论文
共 9 条
[1]   Curving monolithic silicon for nonplanar focal plane array applications [J].
Dinyari, Rostam ;
Rim, Seung-Bum ;
Huang, Kevin ;
Catrysse, Peter B. ;
Peumans, Peter .
APPLIED PHYSICS LETTERS, 2008, 92 (09)
[2]   Thin-film transistor circuits on large-area spherical surfaces [J].
Hsu, PI ;
Bhattacharya, R ;
Gleskova, H ;
Huang, M ;
Xi, Z ;
Suo, Z ;
Wagner, S ;
Sturm, JC .
APPLIED PHYSICS LETTERS, 2002, 81 (09) :1723-1725
[3]   Microfabricated suspensions for electrical connections on the tunable elastomer membrane [J].
Hung, PJ ;
Jeong, KH ;
Liu, GL ;
Lee, LP .
APPLIED PHYSICS LETTERS, 2004, 85 (24) :6051-6053
[4]   Soft lithographic fabrication of an image sensor array on a curved substrate [J].
Jin, HC ;
Abelson, JR ;
Erhardt, MK ;
Nuzzo, RG .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (05) :2548-2551
[5]   Stretchable and foldable silicon integrated circuits [J].
Kim, Dae-Hyeong ;
Ahn, Jong-Hyun ;
Choi, Won Mook ;
Kim, Hoon-Sik ;
Kim, Tae-Ho ;
Song, Jizhou ;
Huang, Yonggang Y. ;
Liu, Zhuangjian ;
Lu, Chun ;
Rogers, John A. .
SCIENCE, 2008, 320 (5875) :507-511
[6]   A hemispherical electronic eye camera based on compressible silicon optoelectronics [J].
Ko, Heung Cho ;
Stoykovich, Mark P. ;
Song, Jizhou ;
Malyarchuk, Viktor ;
Choi, Won Mook ;
Yu, Chang-Jae ;
Geddes, Joseph B., III ;
Xiao, Jianliang ;
Wang, Shuodao ;
Huang, Yonggang ;
Rogers, John A. .
NATURE, 2008, 454 (7205) :748-753
[7]   Mechanics of noncoplanar mesh design for stretchable electronic circuits [J].
Song, J. ;
Huang, Y. ;
Xiao, J. ;
Wang, S. ;
Hwang, K. C. ;
Ko, H. C. ;
Kim, D. -H. ;
Stoykovich, M. P. ;
Rogers, J. A. .
JOURNAL OF APPLIED PHYSICS, 2009, 105 (12)
[8]   Mechanics of hemispherical electronics [J].
Wang, Shuodao ;
Xiao, Jianliang ;
Jung, Inhwa ;
Song, Jizhou ;
Ko, Heung Cho ;
Stoykovich, Mark P. ;
Huang, Yonggang ;
Hwang, Keh-Chih ;
Rogers, John A. .
APPLIED PHYSICS LETTERS, 2009, 95 (18)
[9]   Direct transfer patterning on three dimensionally deformed surfaces at micrometer resolutions and its application to hemispherical focal plane detector arrays [J].
Xu, Xin ;
Davanco, Marcelo ;
Qi, Xiangfei ;
Forrest, Stephen R. .
ORGANIC ELECTRONICS, 2008, 9 (06) :1122-1127