Lines of periodic hole structures produced by laser ablation using interfering femtosecond lasers split by a transmission grating

被引：37

作者：

Nakata, Y ^{[1
]}

Okada, T ^{[1
]}

Maeda, M ^{[1
]}

机构：

[1] Kyushu Univ, Grad Sch Informat Sci & Elect Engn, Fukuoka 8128581, Japan

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2003年 / 77卷 / 3-4期

关键词：

D O I：

10.1007/s00339-003-2078-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Long lines of periodic hole structures were produced on a gold film, a glass slide and polystyrene by laser ablation using interfering femtosecond lasers split by a transmission grating. An optical system comprising a cylindrical lens added to an imaging system with a transmission grating was used to obtain the interference of two beams along a long length, and high laser fluence was used to achieve laser ablation. The separation of each hole was 6.25 mum, and the total length of the structure produced reached 6 mm, which is longest periodic structure produced by a shot of femtosecond laser.

引用

页码：399 / 401

页数：3

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