共 23 条
[4]
Croft D, 2000, P AMER CONTR CONF, P2123, DOI 10.1109/ACC.2000.879576
[5]
High-speed scanning of piezo-probes for nano-fabrication
[J].
JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME,
1998, 120 (03)
:617-622
[7]
CROFT D, 2001, J DYN SYST MEAS CONT, V123
[9]
FLEMING AJ, 2004, P 3 IFAC S MECH SYST
[10]
Construction and testing of a nanomachining instrument
[J].
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,
2000, 24 (04)
:320-328