A simple and rapid formation of wet chemical etched silicon nanowire films at the air-water interface

被引:6
作者
Lee, Tae Il [1 ]
Choi, Won Jin [1 ]
Moon, Kyeong-Ju [1 ]
Choi, Ji-Hyuk [1 ]
Park, Jee Ho [1 ]
Jeong, Unyong [1 ]
Baik, Hong Koo [1 ]
Myoung, Jae Min [1 ]
机构
[1] Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South Korea
关键词
SEMICONDUCTOR NANOWIRES; CARBON NANOTUBES; CHEMISTRY; GROWTH; ZNO;
D O I
10.1039/c1jm12167g
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A spontaneous assembly route to form a thin film of nanowires (NWs) was demonstrated and its feasibility was confirmed through the fabrication of a high-performance multi-Si NW field effect transistor (FET) using this route. Governed by the three mechanisms of spreading, trapping, and two-dimensional packing, the route was optimized for the concentration of Si NWs and the initial volume ratio of aqueous hydrochloride solution to isopropyl alcohol. The successfully formed Si NW thin-film was transferred on a flat polydimethylsiloxane (PDMS) mold and regulated using a repeatable conformal contact method with a new flat PDMS to prepare it for decal printing on an organic dielectric layer. Finally, after depositing the source and drain electrodes on the printed active layer, a high-performance 23-bridged Si NW FET exhibiting a mu(eff) of 51.4 cm(2) V-1 s(-1), an on/off drain current ratio of 10(5), and a V-th of 2.7 V was obtained.
引用
收藏
页码:14203 / 14208
页数:6
相关论文
共 28 条
[1]   Chemical optimization of self-assembled carbon nanotube transistors [J].
Auvray, S ;
Derycke, V ;
Goffman, M ;
Filoramo, A ;
Jost, O ;
Bourgoin, JP .
NANO LETTERS, 2005, 5 (03) :451-455
[2]   Molecular electronics with carbon nanotubes [J].
Avouris, P .
ACCOUNTS OF CHEMICAL RESEARCH, 2002, 35 (12) :1026-1034
[3]  
BHUSHAN B, 2007, HDB NANOTECHNOLOGY, pCH2
[4]  
Cao C., 2004, NANOSTRUCTURES NANOM
[5]   Comparative studies of hydrogen termination on single-crystal silicon surfaces by FT-IR and contact-angle measurements [J].
Chyan, OMR ;
Wu, JJ ;
Chen, JJ .
APPLIED SPECTROSCOPY, 1997, 51 (12) :1905-1909
[6]  
Duan XF, 2000, ADV MATER, V12, P298, DOI 10.1002/(SICI)1521-4095(200002)12:4<298::AID-ADMA298>3.0.CO
[7]  
2-Y
[8]   Low-temperature wafer-scale production of ZnO nanowire arrays [J].
Greene, LE ;
Law, M ;
Goldberger, J ;
Kim, F ;
Johnson, JC ;
Zhang, YF ;
Saykally, RJ ;
Yang, PD .
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 2003, 42 (26) :3031-3034
[9]   Control of thickness and orientation of solution-grown silicon nanowires [J].
Holmes, JD ;
Johnston, KP ;
Doty, RC ;
Korgel, BA .
SCIENCE, 2000, 287 (5457) :1471-1473
[10]   Chemistry and physics in one dimension: Synthesis and properties of nanowires and nanotubes [J].
Hu, JT ;
Odom, TW ;
Lieber, CM .
ACCOUNTS OF CHEMICAL RESEARCH, 1999, 32 (05) :435-445