Optical sensing of flammable substances using porous silicon microcavities

被引：39

作者：

De Stefano, L

Rendina, I

Moretti, L

Rossi, AM

机构：

[1] CNR, IMM, Sez Napoli, I-80131 Naples, Italy

[2] Univ Calabria, DEIS, I-87036 Arcavacata Di Rende, Italy

[3] Ist Elettrotecnico Nazl Galileo Ferraris, Turin, Italy

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2003年 / 100卷 / 03期

关键词：

porous silicon; optical sensors; microcavities; low-dimensional silicon structure;

D O I：

10.1016/S0921-5107(03)00114-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A porous silicon multilayer, constituted by a Fabry-Perot cavity between two distributed Bragg reflectors, is exposed to vapor of several organic species. Different resonant peak shifts in the reflectivity spectra, ascribed to capillary condensation of the vapor in the silicon pores, have been observed. Starting from experimental data, the layer liquid volume fractions condensed in the sensing stack have been numerically estimated. Values ranging between 0.27 (for ethanol) and 0.33 (for iso-propanol) have been found. Time-resolved measurements show that the solvent identification occurs in less then 10 s. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：271 / 274

页数：4

共 10 条

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