共 93 条
[1]
[Anonymous], P 30 ESSDERC
[3]
Boeuf F, 2001, P IEDM, P637
[4]
Chau R., 2001, IEDM, P621
[5]
Chau R., 2002, P INT C SOL STAT DEV, P68, DOI DOI 10.7567/SSDM.2002.D-1-1
[6]
CHIU C, P IEDM 02, P437
[8]
Choi YK, 2002, INTERNATIONAL ELECTRON DEVICES 2002 MEETING, TECHNICAL DIGEST, P259, DOI 10.1109/IEDM.2002.1175827
[9]
Ultra-Thin Body PMOSFETs with selectively deposited Ge source/drain
[J].
2001 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS,
2001,
:19-20

