Blue light emitted from porous silicon obtained by hydrothermal etching

被引:5
作者
Chen, QW
Zhu, JS
Zhou, GE
Song, ZT
Li, XG
Zhang, YH
机构
[1] CTR ADV STUDIES SCI & TECHNOL MICROSTRUCT,NANJING 210093,PEOPLES R CHINA
[2] CHINA CTR ADV SCI & TECHNOL,WORLD LAB,BEIJING 100080,PEOPLES R CHINA
关键词
D O I
10.1088/0953-8984/8/49/006
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Light emitting porous silicon (LEPSi) was prepared by hydrothermal etching of p-type single-crystal silicon. This sample preparation, which does not involve electrochemical etching followed by a rapid thermal oxidation (RTO) process in a dry oxygen ambient, yields blue light emission, the wavelength of the photoluminescence (PL) band peaking at 430 nm. The blue-emission porous silicon (PS) with high mechanical hardness is easily obtained by this technique. Our results are interpreted in terms of the currently suggested theories.
引用
收藏
页码:L753 / L758
页数:6
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