Absolute distance measurement using the frequency comb of a femtosecond laser

被引：43

作者：

Hyun, S. ^{[1
]}

Kim, Y. -J. ^{[1
]}

Kim, Y. ^{[1
]}

Kim, S. -W. ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol KAIST, Dept Mech Engn, Taejon 305701, South Korea

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2010年 / 59卷 / 01期

关键词：

Interferometry; Optical; Metrology; GAUGE BLOCKS; PULSE LASER; INTERFEROMETRY; LONG; UNCERTAINTY; PRECISE; RANGE;

D O I：

10.1016/j.cirp.2010.03.039

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We describe a multi-wavelength interferometer that performs absolute distance measurements by exploiting the frequency comb of a femtosecond pulse laser as the precision wavelength ruler. An external-cavity laser diode is locked to the frequency comb and used as the tunable light source producing multiple wavelengths in discrete hopping and continuous scanning modes. This method enables high speed absolute distance metrology for industrial applications with improved measurement precision directly traceable to the Rb clock of an rf time standard. (C) 2010 CIRP.

引用

页码：555 / 558

页数：4

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