Structural and electronic properties of the interface between the high-k oxide LaAlO3 and Si(001) -: art. no. 137602

被引:48
作者
Först, CJ
Schwarz, K
Blöchl, PE
机构
[1] Tech Univ Clausthal, Inst Theoret Phys, D-38678 Clausthal Zellerfeld, Germany
[2] Vienna Univ Technol, Inst Mat Chem, A-1060 Vienna, Austria
[3] MIT, Dept Nucl Sci & Engn, Cambridge, MA 02139 USA
[4] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
基金
美国国家科学基金会;
关键词
D O I
10.1103/PhysRevLett.95.137602
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The structural and electronic properties of the LaAlO3/Si(001) interface are determined using state-of-the-art electronic structure calculations. The atomic structure differs from previous proposals, but is reminiscent of La adsorption structures on silicon. A phase diagram of the interface stability is calculated as a function of oxygen and Al chemical potentials. We find that an electronically saturated interface is obtained only if Al atoms substitute some of the interfacial Si atoms. These findings raise serious doubts whether LaAlO3 can be used as an epitaxial gate dielectric.
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页数:4
相关论文
共 26 条
[1]  
[Anonymous], 2003, INT TECHNOLOGY ROADM
[2]   First-principles calculations of strontium on Si(001) -: art. no. 075309 [J].
Ashman, CR ;
Först, CJ ;
Schwarz, K ;
Blöchl, PE .
PHYSICAL REVIEW B, 2004, 69 (07)
[3]   Chemistry of La on the Si(001) surface from first principles -: art. no. 155330 [J].
Ashman, CR ;
Först, CJ ;
Schwarz, K ;
Blöchl, PE .
PHYSICAL REVIEW B, 2004, 70 (15) :155330-1
[4]   PROJECTOR AUGMENTED-WAVE METHOD [J].
BLOCHL, PE .
PHYSICAL REVIEW B, 1994, 50 (24) :17953-17979
[5]   Projector augmented wave method:: ab initio molecular dynamics with full wave functions [J].
Blöchl, PE ;
Först, CJ ;
Schimpl, J .
BULLETIN OF MATERIALS SCIENCE, 2003, 26 (01) :33-41
[6]   UNIFIED APPROACH FOR MOLECULAR-DYNAMICS AND DENSITY-FUNCTIONAL THEORY [J].
CAR, R ;
PARRINELLO, M .
PHYSICAL REVIEW LETTERS, 1985, 55 (22) :2471-2474
[7]   Band offset and structure of SrTiO3/Si(001) heterojunctions [J].
Chambers, SA ;
Liang, Y ;
Yu, Z ;
Droopad, R ;
Ramdani, J .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2001, 19 (03) :934-939
[8]   Suppression of subcutaneous oxidation during the deposition of amorphous lanthanum aluminate on silicon [J].
Edge, LF ;
Schlom, DG ;
Brewer, RT ;
Chabal, YJ ;
Williams, JR ;
Chambers, SA ;
Hinkle, C ;
Lucovsky, G ;
Yang, Y ;
Stemmer, S ;
Copel, M ;
Holländer, B ;
Schubert, J .
APPLIED PHYSICS LETTERS, 2004, 84 (23) :4629-4631
[9]   Measurement of the band offsets between amorphous LaAlO3 and silicon [J].
Edge, LF ;
Schlom, DG ;
Chambers, SA ;
Cicerrella, E ;
Freeouf, JL ;
Holländer, B ;
Schubert, J .
APPLIED PHYSICS LETTERS, 2004, 84 (05) :726-728
[10]   Ab-initio simulations on growth and interface properties of epitaxial oxides on silicon [J].
Först, CJ ;
Ashman, CR ;
Schwarz, K ;
Blöchl, PE .
MICROELECTRONIC ENGINEERING, 2005, 80 :402-407