Design and test of new high Q microresonators fabricated by UV-LIGA.

被引：5

作者：

Basrour, S ^{[1
]}

Majjad, H ^{[1
]}

Coudevylle, JR ^{[1
]}

de Labachelerie, M ^{[1
]}

机构：

[1] CNRS, UPR 3203, Lab Phys & Metrol Oscillateurs, F-25044 Besancon, France

来源：

DESIGN,TEST INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2001 | 2001年 / 4408卷

关键词：

microresonators; UV-LIGA; FEM simulations;

D O I：

10.1117/12.425337

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report in this paper the study of a new metallic microresonator realized by UV-LIGA technique. This kind of device is excited electrostatically and takes advantage of the contour modes or Lame-modes of the structure. Design methods of such device are presented and simulated with a Finite Element Program. Details on the microfabrication process are also presented. The vibration modes are detected with an optical bench set-up and preliminary electrical results are presented. A comparison between experiments and numerical predictions are finally discussed.

引用

页码：310 / 316

页数：7

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