Angle measurement using surface-plasmon-resonance heterodyne interferometry: a new method

被引：17

作者：

Guo, JH ^{[1
]}

Zhu, ZM ^{[1
]}

Deng, WM ^{[1
]}

Shen, S ^{[1
]}

机构：

[1] Tsing Hua Univ, Dept Modern Appl Phys, Beijing 100084, Peoples R China

来源：

OPTICAL ENGINEERING | 1998年 / 37卷 / 11期

关键词：

angle measurement; surface plasmon resonance; heterodyne interferometry;

D O I：

10.1117/1.601888

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel optical method for high-resolution angle measurement based on surface plasmon resonance (SPR) is presented. The phase difference between p and s polarization states when SPR takes place is very sensitive to the angle of incidence. Heterodyne interferometry is employed to measure this phase difference and thus to measure small angles. The feasibility of this method is demonstrated. The measurement resolution of 2 x 10(-5) deg can be achieved by this method. (C) 1998 Society of Photo-Optical instrumentation Engineers. [S0091-3286(98)01411-1].

引用

页码：2998 / 3001

页数：4

共 16 条

[1]

Agranovich V.M., 1982, Surface Polaritons

[2]

[Anonymous], 1980, PRINCIPLES OPTICS

[3]

Boardman A. D., 1982, ELECTROMAGNETIC SURF

[4] INTERFEROMETRIC ANGULAR MEASUREMENT [J].

CHAPMAN, GD .

APPLIED OPTICS, 1974, 13 (07) :1646-1651

[5] Angle measurement using total-internal-reflection heterodyne interferometry [J].

Chiu, MH ;

Su, DC .

OPTICAL ENGINEERING, 1997, 36 (06) :1750-1753

[6]

ENNOS AE, 1982, PRECIS ENG, V5, P5

[7] ANGLE MEASUREMENT BASED ON THE INTERNAL-REFLECTION EFFECT AND THE USE OF RIGHT-ANGLE PRISMS [J].

HUANG, PS ;

NI, J .

APPLIED OPTICS, 1995, 34 (22) :4976-4981

[8] ANGLE MEASUREMENT BASED ON THE INTERNAL-REFLECTION EFFECT - A NEW METHOD [J].

HUANG, PS ;

KIYONO, S ;

KAMADA, O .

APPLIED OPTICS, 1992, 31 (28) :6047-6055

[9] SINGLE AXIS PHOTOELECTRONIC AUTOCOLLIMATOR [J].

LUTHER, GG ;

DESLATTES, RD ;

TOWLER, WR .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1984, 55 (05) :747-750

[10] INTERFEROMETRIC MEASUREMENT OF ANGLES [J].

MALACARA, D ;

HARRIS, O .

APPLIED OPTICS, 1970, 9 (07) :1630-&

← 1 2 →