Micro actuators and their applications

被引：39

作者：

Fujita, H ^{[1
]}

Toshiyoshi, H ^{[1
]}

机构：

[1] Univ Tokyo, Inst Ind Sci, Minato Ku, Tokyo 106, Japan

来源：

MICROELECTRONICS JOURNAL | 1998年 / 29卷 / 09期

关键词：

micromachines; optical switch; shape memory alloy; microwave; three-dimensional microstructures; autonomous distributed systems;

D O I：

10.1016/S0026-2692(98)00027-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Driving principles, configurations and applications of micromachined actuators are reviewed. Examples, taken from our research activities, include an optical matrix switch composed of arrayed torsional micromirrors which are driven by electrostatic force; a microactuator using thin film shape memory alloy (TiNi); a microactuator for scanning a microwave antenna and a self-assembly of three-dimensional microstructures by scratch drive microactuators. A system architecture, an autonomous distributed micro system, is proposed to make best use of micromechatronic technology. (C) 1998 Published by Elsevier Science Ltd. All rights reserved.

引用

页码：637 / 640

页数：4

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