Auger electron spectroscopy of the kinetics of evaporation of palladium beaded films from sapphire substrate

被引:7
作者
Imre, A
Gontier-Moya, E
Beke, DL
Ealet, B
机构
[1] Lajos Kossuth Univ, Dept Solid State Phys, H-4010 Debrecen, Hungary
[2] Fac Sci & Tech St Jerome, Lab SERMEC, Marseille 20, France
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1998年 / 67卷 / 04期
关键词
D O I
10.1007/s003390050805
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Kinetics of morphological changes of beaded Pd him on the (10 (1) over bar (2) over bar) surface of sapphire were investigated by Auger electron spectroscopy in the temperature range of 1053-1083 K. It was found that the decrease of the effective thickness during heat treatments under 10(-8) mbar was caused by evaporation from the surface of the substrate. Using the model developed by Kaganovskii and Beke we have established that the process is controlled by surface diffusion. It was shown that the evaporation rate of palladium adatoms from an alumina surface is given by I-o = 1.45 x 10(36) exp{-(393 +/- 46 kJ/mol)/RT}m(-2)s(-1), and, on the basis of an estimation of the surface diffusion length, the effective surface diffusion coefficient D-s' was evaluated: D-s' = 1.2 x 10(4) exp{- (393 +/- 46 kJ/mol)/RT}m(2)s(-1).
引用
收藏
页码:469 / 473
页数:5
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