Giant Piezoelectricity on Si for Hyperactive MEMS

被引：403

作者：

Baek, S. H. ^{[1
]}

Park, J. ^{[2
]}

Kim, D. M. ^{[1
]}

Aksyuk, V. A. ^{[3
]}

Das, R. R. ^{[1
]}

Bu, S. D. ^{[1
]}

Felker, D. A. ^{[4
]}

Lettieri, J. ^{[5
]}

Vaithyanathan, V. ^{[5
]}

Bharadwaja, S. S. N. ^{[5
]}

Bassiri-Gharb, N. ^{[5
]}

Chen, Y. B. ^{[6
]}

Sun, H. P. ^{[6
]}

Folkman, C. M. ^{[1
]}

Jang, H. W. ^{[1
]}

Kreft, D. J. ^{[2
]}

Streiffer, S. K. ^{[7
]}

Ramesh, R. ^{[8
]}

Pan, X. Q. ^{[6
]}

Trolier-McKinstry, S. ^{[5
]}

Schlom, D. G. ^{[5
,9
,10
]}

Rzchowski, M. S. ^{[3
]}

Blick, R. H. ^{[2
]}

Eom, C. B. ^{[1
]}

机构：

[1] Univ Wisconsin, Dept Mat Sci & Engn, Madison, WI 53706 USA

[2] Univ Wisconsin, Dept Elect & Comp Engn, Madison, WI 53706 USA

[3] Natl Inst Stand & Technol, Ctr Nanoscale Sci & Technol, Gaithersburg, MD 20899 USA

[4] Univ Wisconsin, Dept Phys, Madison, WI 53706 USA

[5] Penn State Univ, Dept Mat Sci & Engn, University Pk, PA 16802 USA

[6] Univ Michigan, Dept Mat Sci & Engn, Ann Arbor, MI 48109 USA

[7] Argonne Natl Lab, Ctr Nanoscale Mat, Argonne, IL 60439 USA

[8] Univ Calif Berkeley, Dept Mat Sci & Engn, Berkeley, CA 94720 USA

[9] Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA

[10] Kavli Inst Cornell Nanoscale Sci, Ithaca, NY 14853 USA

来源：

SCIENCE | 2011年 / 334卷 / 6058期

关键词：

TITANATE THIN-FILMS; SINGLE-CRYSTALS; ULTRASONIC TRANSDUCERS; NANOINDENTATION; FABRICATION; DESIGN; SRTIO3;

D O I：

10.1126/science.1207186

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg1/3Nb2/3)O-3-PbTiO3 (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO3 template layer with superior piezoelectric coefficients (e(31,f) = -27 +/- 3 coulombs per square meter) and figures of merit for piezoelectric energy-harvesting systems. We have incorporated these heterostructures into microcantilevers that are actuated with extremely low drive voltage due to thin-film piezoelectric properties that rival bulk PMN-PT single crystals. These epitaxial heterostructures exhibit very large electromechanical coupling for ultrasound medical imaging, microfluidic control, mechanical sensing, and energy harvesting.

引用

页码：958 / 961

页数：5

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