Atomic layer deposited Al2O3 as a capping layer for polymer based transistors

被引:67
作者
Ferrari, S.
Perissinotti, F.
Peron, E.
Fumagalli, L.
Natali, D.
Sampietro, M.
机构
[1] CNR, INFM, Lab MDM, I-20041 Agrate Brianza, Mi, Italy
[2] Politecn Milan, Dipartimento Elettron & Informaz, I-20133 Milan, Italy
关键词
organic thin film transistor; capping; atomic layer deposition; aluminum oxide;
D O I
10.1016/j.orgel.2007.02.004
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The strong sensitivity of organic/polymeric semiconductors to the exposure to O-2 and H2O atmospheres makes the use of capping layers mandatory for the realization of stable devices based on such materials. In this paper we explore the realization of inorganic capping layers by atomic layer deposition (ALD) that provides smooth and pinhole-free films with a great potential as passivation layer for organic based devices. We show that the deposition of Al2O3 on transistors based on poly-3 hexyltiophene (P3HT) allows to obtain air stable devices. Whereas the growth of Al2O3 directly on the P3HT layer leads to a rough interface and significant intermixing between the oxide and the polymer, which results in a deterioration of transistor performances, an interlayer of a poly-alcohol such as poly-vinylphenot interposed between the Al2O3 and the P3HT gives a well defined Al2O3/polymer interface without degradation of the hole mobility. Transistors capped with Al2O3/PVP are very stable in air, with no appreciable differences in the electrical characteristics when measured in vacuum or in air. In addition no significant degradation of the transistors electrical properties was detected even after one month of air exposure. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:407 / 414
页数:8
相关论文
共 26 条
[1]   XPS STUDY OF POLYMER ORGANOMETALLIC INTERACTION - TRIMETHYL ALUMINUM ON POLYVINYL-ALCOHOL POLYMER [J].
AKHTER, S ;
ZHOU, XL ;
WHITE, JM .
APPLIED SURFACE SCIENCE, 1989, 37 (02) :201-216
[2]   Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers [J].
Carcia, P. F. ;
McLean, R. S. ;
Reilly, M. H. ;
Groner, M. D. ;
George, S. M. .
APPLIED PHYSICS LETTERS, 2006, 89 (03)
[3]   Improved nucleation of TiN atomic layer deposition films on SILK low-k polymer dielectric using an Al2O3 atomic layer deposition adhesion layer [J].
Elam, JW ;
Wilson, CA ;
Schuisky, M ;
Sechrist, ZA ;
George, SM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (03) :1099-1107
[4]   Characterisation of aluminium oxynitride gas barrier films [J].
Erlat, AG ;
Henry, BM ;
Ingram, JJ ;
Mountain, DB ;
McGuigan, A ;
Howson, RP ;
Grovenor, CRM ;
Briggs, GAD ;
Tsukahara, Y .
THIN SOLID FILMS, 2001, 388 (1-2) :78-86
[5]   Atomic layer deposition of Al2O3 films on polyethylene particles [J].
Ferguson, JD ;
Weimer, AW ;
George, SM .
CHEMISTRY OF MATERIALS, 2004, 16 (26) :5602-5609
[6]   Gas diffusion barriers on polymers using Al2O3 atomic layer deposition -: art. no. 051907 [J].
Groner, MD ;
George, SM ;
McLean, RS ;
Carcia, PF .
APPLIED PHYSICS LETTERS, 2006, 88 (05) :1-3
[7]   Low-temperature Al2O3 atomic layer deposition [J].
Groner, MD ;
Fabreguette, FH ;
Elam, JW ;
George, SM .
CHEMISTRY OF MATERIALS, 2004, 16 (04) :639-645
[8]   Lifetime of organic thin-film transistors with organic passivation layers - art. no. 073519 [J].
Han, SH ;
Kim, JH ;
Jang, J ;
Cho, SM ;
Oh, MH ;
Lee, SH ;
Choo, DJ .
APPLIED PHYSICS LETTERS, 2006, 88 (07)
[9]   Chemical effects of methyl and methyl ester groups on the nucleation and growth of vapor-deposited aluminum films [J].
Hooper, A ;
Fisher, GL ;
Konstadinidis, K ;
Jung, D ;
Nguyen, H ;
Opila, R ;
Collins, RW ;
Winograd, N ;
Allara, DL .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1999, 121 (35) :8052-8064
[10]   Influence of moisture on device characteristics of polythiophene-based field-effect transistors [J].
Hoshino, S ;
Yoshida, M ;
Uemura, S ;
Kodzasa, T ;
Takada, N ;
Kamata, T ;
Yase, K .
JOURNAL OF APPLIED PHYSICS, 2004, 95 (09) :5088-5093