Multiple-wavelength vertical-cavity laser arrays based on postgrowth lateral-vertical oxidation of AlGaAs

被引:8
作者
Fiore, A [1 ]
Akulova, YA [1 ]
Ko, J [1 ]
Hegblom, ER [1 ]
Coldren, LA [1 ]
机构
[1] Univ Calif Santa Barbara, Dept ECE, Santa Barbara, CA 93106 USA
关键词
D O I
10.1063/1.121795
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrate that combined lateral-vertical oxidation of AlGaAs can be used to change the resonant wavelength of an optical cavity after the single epitaxial growth. A multiple-wavelength array of vertical-cavity surface-emitting lasers with a 48 nm wavelength span has been realized using this technique. (C) 1998 American Institute of Physics.
引用
收藏
页码:282 / 284
页数:3
相关论文
共 10 条
[1]   HYDROLYZATION OXIDATION OF ALXGA1-XAS-ALAS-GAAS QUANTUM-WELL HETEROSTRUCTURES AND SUPERLATTICES [J].
DALLESASSE, JM ;
HOLONYAK, N ;
SUGG, AR ;
RICHARD, TA ;
ELZEIN, N .
APPLIED PHYSICS LETTERS, 1990, 57 (26) :2844-2846
[2]   Multiple-wavelength top-emitting vertical-cavity photonic integrated emitter arrays for direct-coupled wavelength-division multiplexing applications [J].
Hu, SY ;
Hegblom, ER ;
Coldren, LA .
ELECTRONICS LETTERS, 1998, 34 (02) :189-190
[3]   1.55 μm pie-shaped resonant-cavity photodetector arrays for direct-coupled wavelength demultiplexing applications [J].
Hu, SY ;
Ko, J ;
Coldren, LA .
ELECTRONICS LETTERS, 1997, 33 (17) :1486-1488
[4]   Multiwavelength, densely-packed 2x2 vertical-cavity surface-emitting laser array fabricated using selective oxidation [J].
Huffaker, DL ;
Deppe, DG .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1996, 8 (07) :858-860
[5]   Dependence of wavelength control on dielectric structure for vertical-cavity surface-emitting lasers [J].
Huffaker, DL .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (03) :1598-1600
[6]   WIDE-BANDWIDTH DISTRIBUTED BRAGG REFLECTORS USING OXIDE GAAS MULTILAYERS [J].
MACDOUGAL, MH ;
ZHAO, H ;
DAPKUS, PD ;
ZIARI, M ;
STEIER, WH .
ELECTRONICS LETTERS, 1994, 30 (14) :1147-1149
[7]   Wavelength shift of selectively oxidized AlxOy-AlGaAs-GaAs distributed Bragg reflectors [J].
MacDougal, MH ;
Dapkus, PD .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1997, 9 (07) :884-886
[8]   Oxidation of AlGaAs layers for tapered apertures in vertical-cavity lasers [J].
Naone, RL ;
Hegblom, ER ;
Thibeault, BJ ;
Coldren, LA .
ELECTRONICS LETTERS, 1997, 33 (04) :300-301
[9]  
WIPIEJEWSKI T, 1996, ELECT LETT, V32
[10]   Multiple-wavelength vertical-cavity surface-emitting laser arrays with a record wavelength span [J].
Yuen, WP ;
Li, GS ;
ChangHasnain, CJ .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1996, 8 (01) :4-6