Experimental and theoretical characterization of aperture probe cantilevers for polarization sensitive SNOM

被引：4

作者：

Rudow, O ^{[1
]}

Mihalcea, C ^{[1
]}

Vollkopf, A ^{[1
]}

Oesterschulze, E ^{[1
]}

机构：

[1] Univ Gesamthsch Kassel, Inst Tech Phys, D-34109 Kassel, Germany

来源：

FAR- AND NEAR-FIELD OPTICS: PHYSICS AND INFORMATION PROCESSING | 1998年 / 3467卷

关键词：

scanning probe microscopy (SPM); scanning near-held optical microscopy (SNOM); micro electromechanical systems (MEMS); aperture probes; theoretical modelling of aperture probes; polarization near-field microscopy;

D O I：

10.1117/12.326808

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Microfabricated aperture probes for SNOM applications revealed polarization properties which seem to depend on the aperture geometry which is well defined due to the fabrication process. A finite integration approach was used to theoretically calculate the optical transmission characteristics of these probes. In particular the influence of the aperture aspect ratio and the metal film thickness on the transmission and the polarization properties is studied in detail. A modified tip geometry is proposed to improve both, the light confinement at the tip apex and the polarization properties of the aperture probe.

引用

页码：99 / 105

页数：7

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