共 24 条
[11]
*MKS, MKS TECHN MAN
[12]
ROUSSELOT C, 1997, VIDE SCI TECH APPL, V284, P219
[13]
SARAFYAN D, 1967, 29 LOUS STAT U
[14]
SCHILLER S, 1987, 6 INT C ION PLASM AS, pR11
[16]
STOLLENWERK, 1993, THESIS RWTH AACHEN
[19]
TOUZEAU M, 1998, THIN SOLID FILMS, V324, P19