In situ measurements and modeling of carbon nanotube array growth kinetics during chemical vapor deposition

被引:296
作者
Puretzky, AA [1 ]
Geohegan, DB
Jesse, S
Ivanov, IN
Eres, G
机构
[1] Oak Ridge Natl Lab, Condensed Matter Sci Div, Oak Ridge, TN 37831 USA
[2] Univ Tennessee, Dept Mat Sci & Engn, Knoxville, TN 37996 USA
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2005年 / 81卷 / 02期
关键词
D O I
10.1007/s00339-005-3256-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Direct measurements of carbon nanotube growth kinetics are described based upon time-resolved reflectivity (TRR) of a HeNe laser beam from vertically aligned nanotube arrays (VANTAs) as they grow during chemical vapor deposition (CVD). Growth rates and terminal lengths were measured in situ for VANTAs growing during CVD between 535 degrees C and 900 degrees C on Si substrates with evaporated Al/Fe/Mo multi-layered catalysts and acetylene feedstock at different feedstock partial pressures. Methods of analysis of the TRR signals are presented to interpret catalyst particle formation and oxidation, as well as the porosity of the VANTAs. A rate-equation model is developed to describe the measured kinetics in terms of activation energies and rate constants for surface carbon formation and diffusion on the catalyst nanoparticle, nanotube growth, and catalyst over-coating. Taken together with the TRR data, this model enables basic understanding and optimization of growth conditions for any catalyst/feedstock combination. The model lends insight into the main processes responsible for the growth of VANTAs, the measured number of walls in the nanotubes at different temperatures, conditions for growth of single-wall carbon nanotube arrays, and likely catalyst poisoning mechanisms responsible for the sharp decline in growth rates observed at high temperatures.
引用
收藏
页码:223 / 240
页数:18
相关论文
共 39 条
[1]   Multiwall carbon nanotubes: Synthesis and application [J].
Andrews, R ;
Jacques, D ;
Qian, DL ;
Rantell, T .
ACCOUNTS OF CHEMICAL RESEARCH, 2002, 35 (12) :1008-1017
[2]   CATALYTIC GROWTH OF CARBON FILAMENTS [J].
BAKER, RTK .
CARBON, 1989, 27 (03) :315-323
[3]   NUCLEATION AND GROWTH OF CARBON DEPOSITS FROM NICKEL CATALYZED DECOMPOSITION OF ACETYLENE [J].
BAKER, RTK ;
BARBER, MA ;
WAITE, RJ ;
HARRIS, PS ;
FEATES, FS .
JOURNAL OF CATALYSIS, 1972, 26 (01) :51-&
[4]  
BAKER RTK, 1978, CHEM PHYS CARBON, V14, P102
[5]   Watching carbon nanotubes grow [J].
Bonard, JM ;
Croci, M ;
Conus, F ;
Stöckli, T ;
Chatelain, A .
APPLIED PHYSICS LETTERS, 2002, 81 (15) :2836-2838
[6]   Rapid growth of long, vertically aligned carbon nanotubes through efficient catalyst optimization using metal film gradients [J].
Christen, HM ;
Puretzky, AA ;
Cui, H ;
Belay, K ;
Fleming, PH ;
Geohegan, DB ;
Lowndes, DH .
NANO LETTERS, 2004, 4 (10) :1939-1942
[7]   Growth behavior of carbon nanotubes on multilayered metal catalyst film in chemical vapor deposition [J].
Cui, H ;
Eres, G ;
Howe, JY ;
Puretkzy, A ;
Varela, M ;
Geohegan, DB ;
Lowndes, DH .
CHEMICAL PHYSICS LETTERS, 2003, 374 (3-4) :222-228
[8]   Carbon nanotubes: Synthesis, integration, and properties [J].
Dai, HJ .
ACCOUNTS OF CHEMICAL RESEARCH, 2002, 35 (12) :1035-1044
[9]   Is aluminum a suitable buffer layer for carbon nanotube growth? [J].
de los Arcos, T ;
Wu, ZM ;
Oelhafen, P .
CHEMICAL PHYSICS LETTERS, 2003, 380 (3-4) :419-423
[10]   Multiwalled carbon nanotubes by chemical vapor deposition using multilayered metal catalysts [J].
Delzeit, L ;
Nguyen, CV ;
Chen, B ;
Stevens, R ;
Cassell, A ;
Han, J ;
Meyyappan, M .
JOURNAL OF PHYSICAL CHEMISTRY B, 2002, 106 (22) :5629-5635