Profilometry by fringe projection

被引:55
作者
Salas, L
Luna, E
Salinas, J
García, V
Servín, M
机构
[1] Univ Nacl Autonoma Mexico, Astron Inst, Observ Astron Nacl, Ensenada 22830, Baja California, Mexico
[2] Ctr Invest Opt, Lomas Del Campestre 37150, Leon, Mexico
关键词
profilometry; mirror blank testing; mirror blank fabrication; fringe projection;
D O I
10.1117/1.1607968
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present a method to obtain profilometry of a suitable object by fringe projection. The method is appropriate to the case of large objects as compared to the distance from the illuminating source, that is, a nonconstant equivalent wavelength. We develop an experiment to laterally displace a set of fringes on a sphere and obtain quantitative results. There are several orientation parameters involved in the method, and a minimization algorithm is developed to adjust the values of some of them. A series of numerical experiments are performed on this method to test its accuracy under various circumstances. We show that the method can currently attain precisions of approximate tolambda(eq)/80 (lambda(eq) stands for equivalent wavelength) and identify possible sources of error. (C) 2003 Society of Photo-Optical Instrumentation Engineers.
引用
收藏
页码:3307 / 3314
页数:8
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