Phase-shifting interferometry: minimization of systematic errors

被引：47

作者：

Hariharan, P ^{[1
]}

机构：

[1] Univ Sydney, Sch Phys, Dept Phys Opt, Sydney, NSW 2006, Australia

来源：

OPTICAL ENGINEERING | 2000年 / 39卷 / 04期

关键词：

interferometry; phase shifting; optical testing; error reduction;

D O I：

10.1117/1.602443

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Phase-shifting interferometry is now used widely to map the deviations of optical surfaces from a reference plane or reference sphere. However, the accuracy of such measurements is limited by systematic errors due to several causes. These systematic errors can be minimized by a simple averaging technique. (C) 2000 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(00)02103-6].

引用

页码：967 / 969

页数：3

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