An interface circuit for high-accuracy signal processing of differential-capacitance transducers

被引:44
作者
Mochizuki, K [1 ]
Masuda, T
Watanabe, K
机构
[1] Numazu Coll Technol, Dept Elect Engn, Numazu 4108501, Japan
[2] Yamatake Honeywell Co Ltd, Dept Engn, Fujisawa, Kanagawa 2510015, Japan
[3] Shizuoka Univ, Elect Res Inst, Hamamatsu, Shizuoka 4328011, Japan
关键词
analog circuit; capacitance transducers; intelligent sensors; pressure measurement; signal processing;
D O I
10.1109/19.744628
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An interface circuitry for high-accuracy signal processing of differential-capacitance transducers is developed. The architecture is based on the idea that the ratio of one of the transducer capacitances to its total capacitance represents the offset binary equivalent of the physical quantity under measurement. An opamp-based capacitance-to-voltage converter is commonly used for capacitance detection, and an analog-to-digital (A/D) converter is used for the ratiometric operation. Analyses show that the interface can detect the capacitance change as small as 0.01% of the total capacitance. Experimental results are also given to confirm the analyses.
引用
收藏
页码:823 / 827
页数:5
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