Nanomanipulation in a scanning electron microscope

An increasing variety of nano-scale products and devices in key application areas like nanoelectronics, nanotechnology and biotechnology demands novel tools for three-dimensional handling, assembly, characterisation and testing of fundamental building blocks like nanotubes and nanowires. In this paper, the state of the art in nanomanipulation systems based on a bottom-up technology for the manufacturing of nano-devices is reviewed, and a novel sensor-based manipulation and processing system for nano-scale objects which can be integrated in a scanning electron microscope (SEM) is presented. A series of tools for nanopositioning, nanomampulation and microgripping devices has been developed. The control and vision system is based on a client-server approach to ensure positioning task execution and SEM image processing in real-time. The evaluation of the nanomanipulation system is shown by means of gripping of micro-sized powder particles, and by the attachment of carbon nanotubes on tips for atomic force microscopes. With future enhancements, which are currently under development, like a micro-tools exchanger, this system is expected to be a valuable tool for research laboratories and in industry for rapid prototyping in the nano-world. (c) 2005 Elsevier B.V. All rights reserved.